Investigation of nanostructured porous TiO2 and SiO2 thin films as high specific surface area coatings for high sensitivity VOC Love wave (guided SH-SAW) sensors

Laurianne Blanc (1) , Angelique Tetelin (1) , Gregory Tortissier (1) , Cédric Boissière (2) , Jean-Luc Lachaud (1) , Corinne Dejous (1) , Dominique Rebière (1)

1 IMS - Laboratoire de l'intégration, du matériau au système
2 LCMCP (site Paris VI) - Laboratoire de Chimie de la Matière Condensée de Paris (site Paris VI)

Domaines: Micro et nanotechnologies/Microélectronique

Laurianne Blanc, Angelique Tetelin, Gregory Tortissier, Cédric Boissière, Jean-Luc Lachaud, et al.. Investigation of nanostructured porous TiO2 and SiO2 thin films as high specific surface area coatings for high sensitivity VOC Love wave (guided SH-SAW) sensors. IMCS'2010, Jul 2010, Perth, Australia. ⟨hal-00505293⟩