Synthesis of yttria stabilized zirconia thin film by high-power impulse magnetron sputtering

Ekaterina Rezugina (1) , D. Magnfält (2) , M. Aiempanakit (3) , U. Helmersson (3) , Amaël Caillard (1) , Vincent Dolique (1) , Anne Lise Thomann (1) , Pascal Brault (1)

1 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés
2 The Plasma and Coatings Physics group
3 The Plasma & Coatings Physics group

Domaines: Plasmas

Ekaterina Rezugina, D. Magnfält, M. Aiempanakit, U. Helmersson, Amaël Caillard, et al.. Synthesis of yttria stabilized zirconia thin film by high-power impulse magnetron sputtering. Magnetron, Ion processing & Arc Technologies European Conference, Jun 2010, Metz, France. ⟨hal-00493245⟩