YSZ thin films deposited by PLD and magnetron sputtering for SOFC technology
Résumé
Solid Oxide Fuel Cells (SOFC) are an efficient system of energy production minimizing greenhouse emissions. The optimization of constituent materials and their methods of fabrication should reduce the operating temperature while maintaining power performance and increasing durability. The aim for decreasing the working temperature from 1000°C to 700°C can be reached by the reduction of the cell size and, more precisely, by the reduction of the electrolyte thickness down to 5 µm. Vacuum deposition techniques are the best tools to obtain thin, dense, homogeneous, low gas permeability films. The cubic 8YSZ (8%mol yttria stabilized zirconia in cubic structure) phase which is the most widespread electrolyte material used at the present time, was deposited by KrF excimer PLD from a 8YSZ ceramic target and reactive DC magnetron sputtering from a Zr/Y metallic target. Deposition rates, chemical compositions, morphologies and crystallographic structures are considered for both techniques in the aim to compare the coating properties for obtaining electrolyte-compatible coatings.