Unconventional uses of cantilevers for chemical sensing in gas and liquid environments

Isabelle Dufour (1) , Fabien Josse (2) , Stephen Heinrich (3) , Claude Lucat (1) , Cédric Ayela (1) , Francis Ménil (1) , Oliver Brand (4)

1 IMS - Laboratoire de l'intégration, du matériau au système
2 Department of Electrical and Computer Engineering
3 Department of Civil, Construction and Environmental Engineering [Milwaukee]
4 ECE GeorgiaTech - School of Electrical and Computer Engineering - Georgia Insitute of Technology

Domaines: Micro et nanotechnologies/Microélectronique

Isabelle Dufour, Fabien Josse, Stephen Heinrich, Claude Lucat, Cédric Ayela, et al.. Unconventional uses of cantilevers for chemical sensing in gas and liquid environments. Eurosensors XXIV, 2010, Linz, Austria. pp.1021-1026, ⟨10.1016/j.proeng.2010.09.283⟩. ⟨hal-00487499⟩