Thermal excitation and piezoresistive detection of cantilever in-plane resonance modes for sensing applications

Luke Beardslee (1) , Assim Addous (1) , Stephen Heinrich (2) , Fabien Josse (3) , Isabelle Dufour (4) , Oliver Brand (1)

1 ECE GeorgiaTech - School of Electrical and Computer Engineering - Georgia Insitute of Technology
2 Department of Civil, Construction and Environmental Engineering [Milwaukee]
3 Department of Electrical and Computer Engineering
4 IMS - Laboratoire de l'intégration, du matériau au système

Domaines: Micro et nanotechnologies/Microélectronique

Luke Beardslee, Assim Addous, Stephen Heinrich, Fabien Josse, Isabelle Dufour, et al.. Thermal excitation and piezoresistive detection of cantilever in-plane resonance modes for sensing applications. Journal of Microelectromechanical Systems, 2010, 19, pp.1015-1017. ⟨10.1109/JMEMS.2010.2052093⟩. ⟨hal-00487498⟩