Integrated MEMS tuning fork oscillators for sensor applications, 1998. ,
A vacuum packaged surface micromachined resonant accelerometer, Journal of Microelectromechanical Systems, vol.11, issue.6, pp.784-793, 2002. ,
DOI : 10.1109/JMEMS.2002.805207
Electrostatically driven vacuum-encapsulated polysilicon resonators, Sensors and Actuators A: Physical, vol.45, issue.1, pp.67-84, 1994. ,
DOI : 10.1016/0924-4247(94)00813-2
Nonlinearity and hysteresis of resonant strain gauges, Microelectromech . Syst, vol.7, pp.122-127, 1998. ,
Dynamic analysis of variable-geometry electrostatic microactuators, Journal of Micromechanics and Microengineering, vol.16, issue.11, pp.2449-2457, 2006. ,
DOI : 10.1088/0960-1317/16/11/028
Dynamic pull-in phenomenon in MEMS resonators, Nonlinear Dynamics, vol.20, issue.1-2, pp.153-163, 2007. ,
DOI : 10.1002/9783527617548
Capacitance of a strip capacitor, IEEE Transactions on Components, Hybrids, and Manufacturing Technology, vol.13, issue.2, pp.417-423, 1990. ,
DOI : 10.1109/33.56178
Introduction to perturbation techniques, 1981. ,