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From MEMS to NEMS: Modelling and characterization of the non linear dynamics of resonators, a way to enhance the dynamic range

Abstract : The resonant sensing technique is highly sensitive, has the potential for large dynamic range, good linearity, low noise and potentially low power. The detection principle is based on frequency change that is induced by rigidity changes in the resonator. In order to compensate the loss of performances when scaling sensors down to NEMS, it proves convenient to find physical conditions in order to maximise the signal variations and to push the limits of the linear behavior. To do so, a comprehensive model including the main sources of nonlinearities is needed. In the present paper, a process, characterization methods and above all an original analytical model are presented.
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https://hal.archives-ouvertes.fr/hal-00486245
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Najib Kacem, Sébastien Hentz, Sébastien Baguet, Régis Dufour. From MEMS to NEMS: Modelling and characterization of the non linear dynamics of resonators, a way to enhance the dynamic range. XIXe Congrès Français de Mécanique (CFM2009), Aug 2009, Marseille, France. ⟨hal-00486245⟩

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