An acoustic waveguide using doubly-bonded silicon/thinned PPT/silicon structures for RF applications

Abstract : In this paper, we present new results on the development of piezoelectric transducers based on periodically poled ferroelectric domains in a lithium niobate plate bonded between two silicon wafers. The fabrication of the periodically poled transducers operating in the range 50-500 MHz has been achieved on a 3 inches 500 ¿m thick wafer. These devices then have been bonded on silicon wafers to fabricate a waveguide. Guided elliptic as well as partially guided longitudinal modes are excited. The experimental responses of the tested devices are compared to predicted harmonic admittances, showing a good agreement between both results and allowing for a reliable analysis of the nature of the excited modes. We also show interesting studies of material combinations used to guide ultrasonic waves. Dispersion properties have also been studied for a structure Si/PPT/Si. Operating points corresponding to a specific thickness/period ratio are found. Therefore a new conception with a Si/thinned PPT/Si structure is fabricated.
Type de document :
Communication dans un congrès
The 22nd European Frequency and Time forum. IEEE International, Sep 2009, Rome, Italy. pp.923 - 926, 2010, 〈10.1109/ULTSYM.2009.5441895〉
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Contributeur : Sarah Djaouti <>
Soumis le : vendredi 21 mai 2010 - 15:07:12
Dernière modification le : vendredi 6 juillet 2018 - 15:06:08

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F. Bassignot, E. Courjon, G. Ulliac, T. Laroche, J. Garcia, et al.. An acoustic waveguide using doubly-bonded silicon/thinned PPT/silicon structures for RF applications. The 22nd European Frequency and Time forum. IEEE International, Sep 2009, Rome, Italy. pp.923 - 926, 2010, 〈10.1109/ULTSYM.2009.5441895〉. 〈hal-00485700〉

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