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Conference papers

Low actuation voltage SPDT RF MEMS K band switch using a single gold membrane

R. Robin O. Millet K. Segueni L. Buchaillot 1
1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
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Conference papers
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Submitted on : Tuesday, April 20, 2010 - 10:22:12 AM
Last modification on : Wednesday, March 23, 2022 - 3:50:24 PM

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IEMN | CNRS | UNIV-LILLE | UNIV-VALENCIENNES

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R. Robin, O. Millet, K. Segueni, L. Buchaillot. Low actuation voltage SPDT RF MEMS K band switch using a single gold membrane. 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009, 2009, Italy. pp.872-875, ⟨10.1109/MEMSYS.2009.4805522⟩. ⟨hal-00474449⟩

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