Design and operation of a silicon ring resonator for force sensing applications above 1 MHz

Benjamin Walter (1) , Marc Faucher (1) , Emmanuelle Algre (1) , Bernard Legrand (1) , Rodolphe Boisgard (2) , Jean-Pierre Aimé (2) , Lionel Buchaillot (1)

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 CPMOH - Centre de physique moléculaire optique et hertzienne

We present an integrated force probe based on a silicon bulk-mode MEMS resonator. This device uses a silicon ring with symmetrical tips vibrating in the elliptic vibration mode. The tips enable us to make mechanical interactions with surfaces or external objects. Both excitation and detection of the resonator are integrated thanks to electrostatic actuation and capacitive detection. Apart from optical and electrical characterizations of the fabricated device, we report for the first time on the interaction between the resonator tip and a hydrodynamic force applied thanks to a water droplet. This demonstrates a first step toward high frequency atomic force probes for liquid medium applications.

Domaines: Sciences de l'ingénieur [physics]

Benjamin Walter, Marc Faucher, Emmanuelle Algre, Bernard Legrand, Rodolphe Boisgard, et al.. Design and operation of a silicon ring resonator for force sensing applications above 1 MHz. Journal of Micromechanics and Microengineering, 2009, 19 (11), pp.115009-1-7. ⟨10.1088/0960-1317/19/11/115009⟩. ⟨hal-00472725⟩