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Journal articles

Comparison of intrinsic residual stress models in metallic thin films

G. Guisbiers M. Wautelet L. Buchaillot 1
1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
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https://hal.archives-ouvertes.fr/hal-00472721
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Submitted on : Tuesday, April 13, 2010 - 10:25:43 AM
Last modification on : Wednesday, March 23, 2022 - 3:50:24 PM

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IEMN | CNRS | UNIV-LILLE | UNIV-VALENCIENNES

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G. Guisbiers, M. Wautelet, L. Buchaillot. Comparison of intrinsic residual stress models in metallic thin films. Scripta Materialia, Elsevier, 2009, 60, pp.419-422. ⟨10.1016/j.scriptamat.2008.11.014⟩. ⟨hal-00472721⟩

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