Towards the Realization of the First European MEMS Atomic Clock

Christophe Gorecki (1) , M. Hasegawa (1) , N. Passilly (1) , R.K. Chutani (1) , P. Dziuban (1) , S. Galliou (1) , V. Giordano (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

This paper presents the preliminary results of developments of the European version of MEMS atomic clock presenting a short-term stability of 5x10-11 over 1 hour while operating with less than 200 mW power consumption. The frame of such developments is the European proposal MAC-TFC (www.mac-tfc.eu), bringing together a consortium made of five major academic institutions (University of Besançon, University of Neuchâtel, EPFL-Lausanne, Technological University of Wroclaw, University of Ulm); two research institutes (VTT and CEA/Léti) and three industrial partners (SAES Getters, SWATCH R&D and Oscilloquartz).

Domaines: Micro et nanotechnologies/Microélectronique; Autre

Christophe Gorecki, M. Hasegawa, N. Passilly, R.K. Chutani, P. Dziuban, et al.. Towards the Realization of the First European MEMS Atomic Clock. IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, Aug 2009, Clearwater, United States. pp.47-48, ⟨10.1109/OMEMS.2009.5338604⟩. ⟨hal-00467665⟩