An Analytical Model for In-Plane Flexural Vibrations of Thin Cantilever-Based Sensors in Viscous Fluids: Applications to Chemical Sensing in Liquids

Stephen Heinrich (1) , Rabin Maharjan (1) , Luke Beardslee (2) , Oliver Brand (2) , Isabelle Dufour (3) , Fabien Josse (4)

1 Department of Civil, Construction and Environmental Engineering [Milwaukee]
2 ECE GeorgiaTech - School of Electrical and Computer Engineering - Georgia Insitute of Technology
3 IMS - Laboratoire de l'intégration, du matériau au système
4 Department of Electrical and Computer Engineering

Domaines: Micro et nanotechnologies/Microélectronique

Stephen Heinrich, Rabin Maharjan, Luke Beardslee, Oliver Brand, Isabelle Dufour, et al.. An Analytical Model for In-Plane Flexural Vibrations of Thin Cantilever-Based Sensors in Viscous Fluids: Applications to Chemical Sensing in Liquids. 7th International Workshop on Nanomechanical Cantilever Sensors, May 2010, Banff, Canada. 2 p. ⟨hal-00453490⟩