Dynamic Response Modeling of Fluid-Loaded Microcantilevers: A State-Space and Nonlinear Estimation Approach to Determining Viscosity and Density of Fluids

Mohamad Elbsat (1) , Edwin Yaz (1) , Fabien Josse (1) , Isabelle Dufour (2)

1 Department of Electrical and Computer Engineering
2 IMS - Laboratoire de l'intégration, du matériau au système

Domaines: Micro et nanotechnologies/Microélectronique

Mohamad Elbsat, Edwin Yaz, Fabien Josse, Isabelle Dufour. Dynamic Response Modeling of Fluid-Loaded Microcantilevers: A State-Space and Nonlinear Estimation Approach to Determining Viscosity and Density of Fluids. 7th International Workshop on Nanomechanical Cantilever Sensors, May 2010, Banff, Canada. 2 p. ⟨hal-00453489⟩