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Article Dans Une Revue Materials Letters Année : 2009

Synthesis of regular nano-pitched carbon nanotube array by using nanosphere lithography for interconnect applications

Ting Xu
  • Fonction : Auteur
Nay Lin
  • Fonction : Auteur
Franck Chollet

Résumé

In this paper, we report a method based on nanosphere lithography technology for the synthesis of nanopitched vertically aligned multi-walled carbon nanotube array. A monolayer of polystyrene nanospheres with diameter of 650 nm was coated on silicon oxide layer to create hexagonally arranged patterns. A metal layer, which acted as a catalyst for carbon nanotube growth, was deposited on the patterns by e-beam evaporation method. Nano-sized metallic patterns were formed by removing the polystyrene nanospheres. Uniform CNT arrays with pitch of 800 nm were successfully synthesized from the metallic patterns by plasma enhanced chemical vapor deposition. Using nanosphere lithography, the pitch of the single CNT array can be wellcontrolled. Therefore, the as-grown CNTs have potential applications in advanced interconnects technology and other nano applications.

Dates et versions

hal-00446807 , version 1 (13-01-2010)

Identifiants

Citer

Ting Xu, Jianmin Miao, Mohammed Ashraf, Nay Lin, Franck Chollet. Synthesis of regular nano-pitched carbon nanotube array by using nanosphere lithography for interconnect applications. Materials Letters, 2009, 63 (11), pp.867-869. ⟨10.1016/j.matlet.2009.01.048⟩. ⟨hal-00446807⟩
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