Low frequency noise in thin film transistors: effect of the laser annealing of the active layer

Laurent Pichon (1) , Abdelmalek Boukhenoufa (2) , Christophe Cordier (2)

1 IETR - Institut d'Électronique et des Technologies du numéRique
2 Equipe Electronique - Laboratoire GREYC - UMR6072

Domaines: Electronique; Electromagnétisme

Laurent Pichon, Abdelmalek Boukhenoufa, Christophe Cordier. Low frequency noise in thin film transistors: effect of the laser annealing of the active layer. Laser Processing for Semiconductors Devices: Science and Technology, Oct 2007, Saint Malo, France. ⟨hal-00438504⟩