Experimental setup and realization of thin film specimens for microtensile tests

C. Malhaire (1) , C. Seguineau (2) , M. Ignat (2) , C. Josserond (2) , L. Debove (2) , S. Brida (3) , J.M. Desmarres (4) , X. Lafontan (5)

1 IMP-LMPB - Ingénierie des Matériaux Polymères - Laboratoire des Matériaux Polymères et des Biomatériaux
2 SIMaP - Science et Ingénierie des Matériaux et Procédés
3 AUXITROL SA
4 CNES - Centre National d'Études Spatiales [Toulouse]
5 Nova MEMS

This paper describes a microtensile test system and the design as the realization of the samples dedicated to the tensile experiments. Two different technologies for the development of miniaturized specimens are detailed: self-standing tensile samples sustained by silicon frames and metal on polymer specimens obtained by laser cutting. The design of the samples has been optimized by means of finite element simulations. Aluminum beams with very large length on thickness ratio have been released from their silicon substrate using a standard etching process. Stress/strain curves are derived from experimental force/displacement values and discussed in terms of Young's modulus values and critical parameters (flow and rupture stresses).

Mots clés: aluminium; etching; finite element analysis; laser beam cutting; system; silicon; substrates; tensile testing; thin films; Young's modulus; tensile-strength; mechanical-properties; multilayers; system.

Domaines: Matériaux; Matériaux

C. Malhaire, C. Seguineau, M. Ignat, C. Josserond, L. Debove, et al.. Experimental setup and realization of thin film specimens for microtensile tests. Review of Scientific Instruments, 2009, 80 (2), pp.023901 1-5. ⟨10.1063/1.3077153⟩. ⟨hal-00437164⟩