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Communication Dans Un Congrès Année : 2006

CMOS compatible fast switching RF MEMS varactors

Benjamin Lacroix
Arnaud Pothier
Aurelian Crunteanu
Pierre Blondy
  • Fonction : Auteur
  • PersonId : 915831

Résumé

This paper presents fast switching RF-MEMS CMOS compatible varactors. By introducing bended sides on a conventional air bridge, it is shown experimentally that the resonance frequency of aluminum bridges is increased by a factor 2.5. Based on miniature bridges design (around ten times smaller than standard MEMS varactors), presented devices allow to reach higher mechanical resonance frequencies, resulting in faster switching times. Several designs are presented with recorded resonance frequencies between 1 and 3 MHz and measured switching time under 600 ns
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Dates et versions

hal-00418931 , version 1 (22-09-2009)

Identifiants

Citer

Benjamin Lacroix, Arnaud Pothier, Aurelian Crunteanu, C. Cibert, Frédéric Dumas-Bouchiat, et al.. CMOS compatible fast switching RF MEMS varactors. 36th European Microwave Conference, Sep 2006, Manchester, United Kingdom. pp.1720-1723, ⟨10.1109/EUMC.2006.281119⟩. ⟨hal-00418931⟩
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