Improvement of strain gauges micro-forces measurement using Kalman optimal filtering.

Yassine Haddab (1) , Qiao Chen (1) , Philippe Lutz (1)

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

Manipulation of small components and assembly of Microsystems require force measurement. In the microworld (the world of very small components), signal/noise ratio is very low due to the weak amplitude of the signals. To be used in feedback control or in a micromanipulation system, a force sensor must allow static and dynamic measurements. In this paper, we present a micro-force measurement system based on the use of strain gauges and a Kalman optimal filter. Using a model of the measurement system and a statistical description of the noise, the optimal filter allows filtering the noise without loss of dynamic measurement. The performances of the measurement system are improved and fast force variations can be measured.

Mots clés: Micro-force measurement; measurement noise; strain gauges

Mots clés: Kalman filter; piezoelectric cantilevers; strain gauges.

Domaines: Micro et nanotechnologies/Microélectronique

Yassine Haddab, Qiao Chen, Philippe Lutz. Improvement of strain gauges micro-forces measurement using Kalman optimal filtering.. Mechatronics, 2009, 19 (4), pp.457-462. ⟨10.1016/j.mechatronics.2008.11.012⟩. ⟨hal-00403147⟩