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Conference papers

Applications of various optical techniques for ESD defect localization

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Conference papers
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https://hal.archives-ouvertes.fr/hal-00401519
Contributor : Frédéric Darracq <>
Submitted on : Friday, July 3, 2009 - 12:02:38 PM
Last modification on : Thursday, June 10, 2021 - 3:05:22 AM

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  • HAL Id : hal-00401519, version 1

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Fabien Essely, Frédéric Darracq, Vincent Pouget, Mustapha Remmach, Félix Beaudoin, et al.. Applications of various optical techniques for ESD defect localization. European Symposium on Reliability of Electron Devices, Failure Physics and analysis (ESREF), 2006, wuppertal, Germany. pp.1563-1568. ⟨hal-00401519⟩

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