Applications of various optical techniques for ESD defect localization

Fabien Essely (1) , Frédéric Darracq (1) , Vincent Pouget (1) , Mustapha Remmach (1) , Félix Beaudoin (2) , Nicolas Guitard (3) , Marise Bafleur (3) , Philippe Perdu (2) , Andre Touboul (1) , Dean Lewis (1)

1 IMS - Laboratoire de l'intégration, du matériau au système
2 CNES - Centre National d'Études Spatiales [Toulouse]
3 LAAS - Laboratoire d'analyse et d'architecture des systèmes

Domaines: Electronique

Fabien Essely, Frédéric Darracq, Vincent Pouget, Mustapha Remmach, Félix Beaudoin, et al.. Applications of various optical techniques for ESD defect localization. European Symposium on Reliability of Electron Devices, Failure Physics and analysis (ESREF), 2006, wuppertal, Germany. pp.1563-1568. ⟨hal-00401519⟩