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Applications of various optical techniques for ESD defect localization

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https://hal.archives-ouvertes.fr/hal-00401519
Contributor : Frédéric Darracq <>
Submitted on : Friday, July 3, 2009 - 12:02:38 PM
Last modification on : Friday, January 10, 2020 - 9:08:07 PM

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  • HAL Id : hal-00401519, version 1

Citation

Fabien Essely, Frédéric Darracq, Vincent Pouget, Mustapha Remmach, Félix Beaudoin, et al.. Applications of various optical techniques for ESD defect localization. European Symposium on Reliability of Electron Devices, Failure Physics and analysis (ESREF), 2006, wuppertal, Germany. pp.1563-1568. ⟨hal-00401519⟩

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