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Communication Dans Un Congrès Année : 2007

Temperature-Compensated Structure For Saw Pressure Sensor In Very High Temperature

Résumé

This paper concerns the design and the analysis of a surface acoustic wave (SAW) pressure sensor that is capable to work in high temperature (up to 800degC) environment. Novel structures of the device are also presented for self-temperature compensation. Special attention is made on the different possible multilayer structures that could be used, the behavior of the sensor, the electromechanical coupling factor, the wave velocity as well as the required RF matching circuit. These parameters are critical issues for this special SAW sensor.

Domaines

Electronique
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Dates et versions

hal-00395343 , version 1 (15-06-2009)

Identifiants

Citer

T. Hoang, P. Rey, M.-H. Vaudaine, J.S. Danel, Ph. Robert, et al.. Temperature-Compensated Structure For Saw Pressure Sensor In Very High Temperature. IEEE International Frequency Control Symposium, 2007 Joint with the 21st European Frequency and Time Forum, May 2007, Genève, Switzerland. pp.40-44, ⟨10.1109/FREQ.2007.4319026⟩. ⟨hal-00395343⟩
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