Trade-Off between Issues in AlN/SiO2/Si Pressure Sensor - Archive ouverte HAL Accéder directement au contenu
Communication Dans Un Congrès Année : 2007

Trade-Off between Issues in AlN/SiO2/Si Pressure Sensor

Résumé

The design, modeling, fabrication process of a novel AIN/SiO2/Si surface acoustic wave (SAW) pressure sensor are introduced. Self temperature compensation structure is given. Special attention is made on the different possible multilayer structures that could be used, trade-off between parameters of pressure sensor.

Domaines

Electronique
Fichier non déposé

Dates et versions

hal-00395329 , version 1 (15-06-2009)

Identifiants

Citer

T. Hoang, Ph. Benech, P. Rey, M.-H. Vaudaine, P. Lemaitre-Auger, et al.. Trade-Off between Issues in AlN/SiO2/Si Pressure Sensor. International Conference on Perspective Technologies and Methods in MEMS Design, 2007. MEMSTECH 2007., May 2007, Lviv-Polyana, Ukraine. pp.142-147, ⟨10.1109/MEMSTECH.2007.4283449⟩. ⟨hal-00395329⟩
55 Consultations
0 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More