Study of deeply buried waveguides: A way towards 3D integration - Archive ouverte HAL Accéder directement au contenu
Article Dans Une Revue Material Science and Engineering B Année : 2008

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hal-00394088 , version 1 (10-06-2009)

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J. Grelin, Elise Ghibaudo, J.E. Broquin. Study of deeply buried waveguides: A way towards 3D integration. Material Science and Engineering B, 2008, 149 (2), pp.185-189. ⟨10.1016/j.mseb.2007.11.013⟩. ⟨hal-00394088⟩
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