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Study of deeply buried waveguides: A way towards 3D integration

J. Grelin 1 Elise Ghibaudo 1 J.E. Broquin 1
1 IMEP-LAHC - Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation
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https://hal.archives-ouvertes.fr/hal-00394088
Contributor : Chahla Domenget <>
Submitted on : Wednesday, June 10, 2009 - 2:39:51 PM
Last modification on : Thursday, November 19, 2020 - 1:00:46 PM

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CNRS | UNIV-SAVOIE | FMNT | IMEP-LAHC | PHOTO | UGA

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J. Grelin, Elise Ghibaudo, J.E. Broquin. Study of deeply buried waveguides: A way towards 3D integration. Material Science and Engineering B, 2008, 149 (2), pp.185-189. ⟨10.1016/j.mseb.2007.11.013⟩. ⟨hal-00394088⟩

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