Controlled growth of aluminum oxide thin films on hydrogen terminated Si(001) surface

S. Vizzini (1) , H. Oughaddou , C. Leandri (1) , V.K. Lazarov , A. Kohn , K. Nguyen , C. Coudreau (1) , J.-P. Biberian (1) , B. Ealet (1) , J.-L. Lazzari (1) , F.A. d'Avitaya , B. Aufray (1)

1 CRMCN - Centre de recherche de la matière condensée et des nanosciences

S. Vizzini, H. Oughaddou, C. Leandri, V.K. Lazarov, A. Kohn, et al.. Controlled growth of aluminum oxide thin films on hydrogen terminated Si(001) surface. Journal of Crystal Growth, 2007, 305, pp.26. ⟨hal-00386873⟩