Optimizing pulsed OBIC technique for ESD defect localization

Abstract : This paper presents a study of the well-known Optical Beam Induced Current (OBIC) technique applied to ESD defect localisation. OBIC technique is improved by using a pulsed laser beam instead of a continuous one. Critical parameters of the experimentation are explored in this study. We discuss especially on the influence of the laser energy, the bias of the device under and the spatial resolution of the technique
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Fabien Essely, Nicolas Guitard, Frédéric Darracq, Vincent Pouget, Marise Bafleur, et al.. Optimizing pulsed OBIC technique for ESD defect localization. IEEE Transactions on Device and Materials Reliability, Institute of Electrical and Electronics Engineers, 2007, 7 (4), pp.617-624. ⟨hal-00382949⟩

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