Stuctural and dielectric study of parylene C thin films

A. Kahouli (1, 2) , Alain Sylvestre (1) , Luc Ortega (3) , Fathi Jomni (2) , Béchir Yangui (2) , M. Maillard (4) , B. Berge (4) , J.C. Robert (4) , J. Legrand (4)

1 G2ELab - Laboratoire de Génie Electrique de Grenoble
2 LABMOP - Laboratory for Materials, Organization and Properties
3 NEEL - X'Press - X'Press : diffraction et hautes pressions
4 Varioptic SA

Domaines: Energie électrique

A. Kahouli, Alain Sylvestre, Luc Ortega, Fathi Jomni, Béchir Yangui, et al.. Stuctural and dielectric study of parylene C thin films. Applied Physics Letters, 2009, 94 (15), pp.152901. ⟨10.1063/1.3114404⟩. ⟨hal-00377783⟩