Controller design for a closed-loop micromachined accelerometer

Jonathan Soen (1) , Alina Voda (2) , Cyril Condemine (1)

1 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
2 GIPSA-SLR - GIPSA - Systèmes linéaires et robustesse

This paper presents control strategies for the design of a digital closed-loop micromachined accelerometer. The microsystem is composed of a mechanical part sensitive to the external acceleration, and a fully integrated electronic part devoted to the readout and control. A feedback control approach was used from the beginning of the sensor design in order to reach a good trade-off between circuit complexity and control requirements (inputs/outputs required for identification, sampling frequency, controller order, . . .). The measurement performance is linked to the closed-loop sensitivity functions and a controller design based on a pole placement method with sensitivity functions shaping is proposed. Simulation results forecast excellent performance and this identification/controller design procedure was successfully applied to an early microsensor prototype.

Mots clés: Closed-loop microsystems; Microsystems; Accelerometers; Controller design; Pole assignment; Sensitivity functions shaping; SD Analog to digital converters

Domaines: Micro et nanotechnologies/Microélectronique; Automatique / Robotique

Jonathan Soen, Alina Voda, Cyril Condemine. Controller design for a closed-loop micromachined accelerometer. Control Engineering Practice, 2007, 15 (1), pp.57-68. ⟨10.1016/j.conengprac.2006.03.001⟩. ⟨hal-00375822⟩