G. Cunge, R. L. Inglebert, O. Joubert, L. Vallier, and N. Sadeghi, Ion flux composition in HBr/Cl[sub 2]/O[sub 2] and HBr/Cl[sub 2]/O[sub 2]/CF[sub 4] chemistries during silicon etching in industrial high-density plasmas, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol.20, issue.5, p.2137, 2002.
DOI : 10.1116/1.1511219

L. Li, New formulation of the Fourier modal method for crossed surface-relief gratings, Journal of the Optical Society of America A, vol.14, issue.10, p.14, 1997.
DOI : 10.1364/JOSAA.14.002758

C. J. Raymond, Proceeding of the SPIE, pp.564-575, 2004.

A. Tikhonov and V. Arsenin, solution of Ill-posed Problems, 1977.

B. Busstos, A Graphics Hardware Accelerated algorithm for Nearest Neighbor Search, lecture notes in computer science, pp.196-199, 2006.