The tunnel current as a subnanometer motion sensor

Sylvain Blanvillain (1) , Alina Voda (1) , Gildas Besancon (2) , Gabriel Buche (3)

1 GIPSA-SLR - GIPSA - Systèmes linéaires et robustesse
2 GIPSA-SYSCO - GIPSA - Systèmes non linéaires et complexité
3 GIPSA-Services - GIPSA-Services

This paper deals with the tunnel current as a position sensor at nanoscale. It is shown that electron tunneling commonly used in Scanning Tunneling Microscopes (STM) can be used to control the motion of a Nano Electromechanical System (NEMS) with an accuracy of 1:10

Domaines: Automatique / Robotique

Sylvain Blanvillain, Alina Voda, Gildas Besancon, Gabriel Buche. The tunnel current as a subnanometer motion sensor. ECC 2009 - European Control Conference, Aug 2009, Budapest, Hungary. ⟨hal-00373122⟩