AlN thin film for bulk acoustic wave resonator

Ji Fan 1 Matthieu Chatras 1 Aurelian Crunteanu 1 A. Bassam Corinne Champeaux 2 Alain Catherinot 2 Dominique Cros 1
1 MINACOM
XLIM - XLIM
2 Axe 2 : procédés de traitements de surface
SPCTS - Science des Procédés Céramiques et de Traitements de Surface
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Conference papers
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https://hal.archives-ouvertes.fr/hal-00367406
Contributor : Martine Segear <>
Submitted on : Wednesday, March 11, 2009 - 10:58:05 AM
Last modification on : Tuesday, November 12, 2019 - 2:06:03 PM

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Ji Fan, Matthieu Chatras, Aurelian Crunteanu, A. Bassam, Corinne Champeaux, et al.. AlN thin film for bulk acoustic wave resonator. 3rd International Workshop on Advanced Ceramics (IWAC03), Nov 2008, LIMOGES, France. ⟨hal-00367406⟩

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