"Synthesis of PECVD a-siCxNy:H membranes as molecular sieves for small gas separation"

W. Kafrouni (1) , V. Rouessac (1) , A. Julbe (1) , J. Durand (1)

1 IEM - Institut Européen des membranes

Domaines: Chimie

W. Kafrouni, V. Rouessac, A. Julbe, J. Durand. "Synthesis of PECVD a-siCxNy:H membranes as molecular sieves for small gas separation". Journal of Membrane Science, 2009, 329, pp.130-137. ⟨10.1016/j.memsci.2008.12.028⟩. ⟨hal-00362053⟩