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Characterization of in-IC integrable in-plane nanometer scale resonators fabricated by a silicon on nothing advanced CMOS technology
C. Durand
F. Casset
Bernard Legrand
M. Faucher
P. Renaux
D. Mercier
D. Renaud
D. Dutartre
E. Ollier
P. Ancey
L. Buchaillot
1
E. Ollier
Author
P. Ancey
Author
L. Buchaillot 1
Author IdHAL : lionel-buchaillot ResearcherId : http://www.researcherid.com/rid/R-2582-2016 ORCID : https://orcid.org/0000-0002-9844-0498
1
IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520 ([Univ. Lille, CNRS, Ecole Centrale Lille, Yncréa-ISEN, UVHC] ––
Laboratoire Central – Cité Scientifique – Avenue Poincaré – CS 60069 – 59652 VILLENEUVE D’ASCQ CEDEX - France)
- Centrale Lille (École Centrale de Lille - Cité Scientifique - CS 20048 59651 Villeneuve d'Ascq Cedex - France)
- Institut supérieur de l'électronique et du numérique (ISEN) (France)
- UVHC - Université de Valenciennes et du Hainaut-Cambrésis (Campus Mont Houy 59313 Valenciennes Cedex 9 - France)
- Université de Lille (Lille - France)
- CNRS - Centre National de la Recherche Scientifique : UMR8520 (France)
- UPHF - Université Polytechnique Hauts-de-France (Campus Mont Houy 59313 Valenciennes Cedex 9 - France)
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Conference papers
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https://hal.archives-ouvertes.fr/hal-00361112
Contributor : Collection Iemn Connect in order to contact the contributor
Submitted on : Friday, February 13, 2009 - 9:59:58 AM
Last modification on : Wednesday, March 23, 2022 - 3:50:22 PM
Contributor : Collection Iemn Connect in order to contact the contributor
Submitted on : Friday, February 13, 2009 - 9:59:58 AM
Last modification on : Wednesday, March 23, 2022 - 3:50:22 PM
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- HAL Id : hal-00361112, version 1
- DOI : 10.1109/MEMSYS.2008.4443831
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IEMN | CNRS | UNIV-LILLE | UNIV-VALENCIENNES
Citation
C. Durand, F. Casset, Bernard Legrand, M. Faucher, P. Renaux, et al.. Characterization of in-IC integrable in-plane nanometer scale resonators fabricated by a silicon on nothing advanced CMOS technology. 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008, 2008, United States. pp.1016-1019, ⟨10.1109/MEMSYS.2008.4443831⟩. ⟨hal-00361112⟩
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