HAL will be down for maintenance from Friday, June 10 at 4pm through Monday, June 13 at 9am. More information
Skip to Main content Skip to Navigation
Journal articles

Comparative analysis for the local piezoelectric properties of ion beam and reactive ion beam etched Pb(Zr,Ti)O-3 thin films

Document type :
Journal articles
Complete list of metadata

https://hal.archives-ouvertes.fr/hal-00360338
Contributor : Collection Iemn Connect in order to contact the contributor
Submitted on : Wednesday, February 11, 2009 - 8:32:04 AM
Last modification on : Wednesday, March 23, 2022 - 3:50:22 PM

Identifiers

Citation

C. Blach-Legrand, S. Saitzek, A. da Costa, R. Desfeux, Caroline Soyer, et al.. Comparative analysis for the local piezoelectric properties of ion beam and reactive ion beam etched Pb(Zr,Ti)O-3 thin films. Integrated Ferroelectrics, Taylor & Francis, 2008, 98, pp.230-240. ⟨10.1080/10584580802096614⟩. ⟨hal-00360338⟩

Share

Metrics

Record views

30