GaN materials growth by MOVPE in a new design of reactor using DMHy and NH3

S. Gautier (1) , C. Sartel (1) , S. Ould Saad Hamady (1) , J. Martin (1) , A. Sirenko , A. Ougazzaden

1 LMOPS - Laboratoire Matériaux Optiques, Photonique et Systèmes

Domaines: Optique [physics.optics]

S. Gautier, C. Sartel, S. Ould Saad Hamady, J. Martin, A. Sirenko, et al.. GaN materials growth by MOVPE in a new design of reactor using DMHy and NH3. IC MOVPE, 2006, Miyazaki, Japan. ⟨hal-00334614⟩