Study of hydrocarbon dust particle formation in Ar-CH4 radiofrequency low pressure discharge

Abdelaziz Mezeghrane (1, 2) , Lénaïc Couëdel (1) , Gaëtan Wattieaux (1) , Maxime Mikikian (1) , Omar Lamrous (2) , Yves Tessier (1) , Laïfa Boufendi (1)

1 GREMI - Groupe de recherches sur l'énergétique des milieux ionisés
2 LPCQ - Laboratoire de Physique et Chimie Quantique [Tizi-Ouzou]

The aim of this paper is to contribute to improve the knowledge concerning the growth steps of hydrocarbon dust particles in Ar-CH4 plasma. To achieve this aim, we monitored the plasma impedance modification, due to the particle formation, by measuring the time-evolution of the self bias voltage, the current third harmonic and the electron density. Emission Spectroscopy turns out to be a good tool for estimating the electron temperature. While, Transmission and Scanning Electron Microscopy are used to characterize the morphology and the size of collected powders.

Domaines: Plasmas; Physique des plasmas [physics.plasm-ph]

Abdelaziz Mezeghrane, Lénaïc Couëdel, Gaëtan Wattieaux, Maxime Mikikian, Omar Lamrous, et al.. Study of hydrocarbon dust particle formation in Ar-CH4 radiofrequency low pressure discharge. 34th European Physical Society Conference on Plasma Physics, Jul 2007, Varsovie, Poland. pp.P-5.047. ⟨hal-00331887⟩