µSCALE DIAMAGNETIC LEVITATION: APPLICATION TO ACCELEROMETER
Résumé
The interest of an accelerometer with a diamagnetic levitating proof mass is studied. The weakness of the diamagnetic effect is counterbalanced by scale reduction laws. At micrometric scale, levitation of diamagnetic bodies is possible above permanent µmagnets. But levitation of µmagnets above diamagnetic material is also possible. Until now there is a lack in the study of the new possibilities offered by such levitation. Semi-analytical simulations predict interesting performances in terms of sensitivity, bandwidth, applications range and shock resistance. The model used is successfully confronted with experimental results, in the case of a levitating diamagnetic body, but also in the case of a levitating magnet. The potentials of this original technology are confirmed.