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Micromachined thermal accelerometer

Frédérick Mailly 1 Alain Giani 1 A. Martinez R. Bonnot 1 Pierre Temple-Boyer Alexandre Boyer 1 
1 CEM2 - Centre d'Electronique et de Micro-optoélectronique de Montpellier
Keywords : Thermal sensor Accelerometer Tilt measurement
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Journal articles
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https://hal.archives-ouvertes.fr/hal-00327192
Contributor : Daniel Gasquet Connect in order to contact the contributor
Submitted on : Tuesday, October 7, 2008 - 4:41:40 PM
Last modification on : Saturday, June 25, 2022 - 9:40:58 AM

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CNRS | IES | UNIV-MONTPELLIER | CEM2

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Frédérick Mailly, Alain Giani, A. Martinez, R. Bonnot, Pierre Temple-Boyer, et al.. Micromachined thermal accelerometer. Sensors and Actuators, Elsevier, 2003, 103 (3), pp.359-363. ⟨10.1016/S0924-4247(02)00428-4⟩. ⟨hal-00327192⟩

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