Glass nanostructures fabricated by soft thermal nanoimprint

Christophe Peroz (1) , Caroline Heitz (1) , Valérie Goletto (2) , Etienne Barthel (1) , Elin Sondergard (1)

1 SVI - Surface du Verre et Interfaces
2 SGR - Saint-Gobain Recherche

A one-step, fast and potential low cost process has been developed to fabricate silica like glass nanostructures by combining sol-gel chemistry and thermal nanoimprint. An inorganic-organic sol-gel thin film is patterned at low pressure and temperature with flexible stamps. Various geometries are achieved with a patterning resolution of about 150 nm and patterns aspect ratio higher than 4. To obtain pure silica structures a thermal annealing at high temperatures is required. During this step most of the structures collapse due to fluidization of the sol-gel material. It is shown that if a suitable condensation level is obtained during imprinting, the nanostructures are thermally stable.

Domaines: Science des matériaux [cond-mat.mtrl-sci]; Matériaux

Christophe Peroz, Caroline Heitz, Valérie Goletto, Etienne Barthel, Elin Sondergard. Glass nanostructures fabricated by soft thermal nanoimprint. Journal of Vacuum Science and Technology, 2007, 25, pp.L 27-30. ⟨hal-00292810⟩