High power applications of RF-MEMS

Pierre Blondy (1) , Cristiano Palego (1) , Arnaud Pothier (1) , Aurelian Crunteanu (1) , A. Gasseling , Corinne Champeaux (2) , Alain Catherinot (2) , Pascal Tristant (2)

1 MINACOM
2 Axe 2 : procédés de traitements de surface

This paper presents recent results on the development of high power MEMS switched varactors. Design methodology as well as fabrication and measurement results are presented. The MEMS varactors are made of a thick metal gold cantilever, with a reduced contact area, that allows to control high power microwave signals. Operation up to 5 watts CW is demonstrated, with good reliability. First results on applications to phase shifters is presented

Pierre Blondy, Cristiano Palego, Arnaud Pothier, Aurelian Crunteanu, A. Gasseling, et al.. High power applications of RF-MEMS. Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 2007, Jan 2007, Long Beach, United States. pp.166-168, ⟨10.1109/SMIC.2007.322785⟩. ⟨hal-00258539⟩