Self-assembly of three-dimensional photonic crystals on structured silicon wafers

P. Ferrand 1 M. Egen 2 B. Griesebock J. Ahopelto 3 M. Müller R. Zentel 2 S. G. Romanov 1 C. M. Sotomayor Torres 1
1 Institute of Materials Engineering
2 Institute for Organic Chemistry
3 VTT Center for Microelectronics
Abstract : The growth of an opal-like polymer photonic crystal (PhC) on deeply etched silicon wafers is reported. It is shown that 10 micrometer deep trenches, as narrow as 10 micrometer can be uniformly filled by self-assembly of microspheres, in a close-packed face-centered-cubic lattice. These observations are confirmed by optical reflectance measurements in the visible range, in agreement with theoretical calculations of the photonic band gap. A slight fluctuation of the lattice parameter is noticed in the case of the narrowest channels. The possibility to detach the PhC from the substrate is also demonstrated. The potential of this approach for building complex PhC-based complex architectures is discussed.
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https://hal.archives-ouvertes.fr/hal-00278072
Contributeur : Patrick Ferrand <>
Soumis le : mercredi 15 avril 2015 - 10:14:15
Dernière modification le : mercredi 24 avril 2019 - 09:38:06
Archivage à long terme le : lundi 14 septembre 2015 - 08:55:43

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Ferrand et al - APL 81-2689 (1...
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P. Ferrand, M. Egen, B. Griesebock, J. Ahopelto, M. Müller, et al.. Self-assembly of three-dimensional photonic crystals on structured silicon wafers. Applied Physics Letters, American Institute of Physics, 2002, 81 (15), pp.2689-2691. ⟨10.1063/1.1513212⟩. ⟨hal-00278072⟩

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