AN AUTOMATED MEASUREMENT BENCH FOR INTEGRATED BAW RESONATORS NONLINEAR CHARACTERIZATION AT MICROWAVE FREQUENCIES
Résumé
A test set-up for the characterization of microwave BAW resonators driven into nonlinear regime is presented. In this set-up, a network analyser is coupled to a spectrum analyser, in order to measure simultaneously the resonant frequencies and the nonlinear behaviour (harmonic generation). A power amplifier (5 W) is used at the network analyser output, because this nonlinear behaviour can only be observed at high power. Finally, the set-up is used to evaluate these properties on a set of SMR resonators.
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