Non destructive dielectric characterization of thin ferroelectric films materials using coplanar line structure

Abstract : this paper presents a nouvelle and non-destructive Broadband characterization method which uses a coplanar line for the measurement of the complex permittivity of linear dielectric materials and precisely, that of ferroelectric thin films. The method uses the transmission coefficient and the quasi-TEM analysis to find the effective permittivity of the multilayer system, and then the coplanar conformal mapping technique is employed to extract the relative permittivity of the thin layer. Comparing our results to those of cavity resonator method at 12GHz shows a good agreement. The measurement is done in the microwave frequency band (45MHz- 20GHz).
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https://hal.archives-ouvertes.fr/hal-00273403
Contributor : Valérie Vigneras <>
Submitted on : Tuesday, April 15, 2008 - 11:42:20 AM
Last modification on : Thursday, January 11, 2018 - 6:21:06 AM

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  • HAL Id : hal-00273403, version 1

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Hussein Kassem, Valérie Vigneras, Guillaume Lunet. Non destructive dielectric characterization of thin ferroelectric films materials using coplanar line structure. Integrated Ferroelectrics, Taylor & Francis, 2007, 94 (1), pp.82-93. ⟨hal-00273403⟩

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