TRING-module : a high-range and high-precision 2DoF microsystem dedicated to a modular micromanipulation station.

Micky Rakotondrabe (1) , Yassine Haddab (1) , Philippe Lutz (1)

1 LAB - Laboratoire d'automatique de Besançon

As part of a microfactory concept, a micromanipulation station is made up of two independant microsystems having each one two degrees of freedom (rotation and linear motions). That allows the station to manipulate microparts with a high range of dimensions, from 10 microns to some millimeters (2 mm). This paper presents one of these microsystems called TRING-module.

Domaines: Micro et nanotechnologies/Microélectronique

Micky Rakotondrabe, Yassine Haddab, Philippe Lutz. TRING-module : a high-range and high-precision 2DoF microsystem dedicated to a modular micromanipulation station.. Proceedings of the 5th International Workshop on MicroFactories, IWMF'06., Oct 2006, Besançon, France. pp.4. ⟨hal-00264458⟩