A model for chemically-induced mechanical loading on MEMS

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Journal articles
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https://hal.archives-ouvertes.fr/hal-00262224
Contributor : Christine Froidevaux <>
Submitted on : Tuesday, March 11, 2008 - 11:06:07 AM
Last modification on : Monday, September 3, 2018 - 11:30:08 AM

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  • HAL Id : hal-00262224, version 1

Citation

Fabien Amiot. A model for chemically-induced mechanical loading on MEMS. Journal of Mechanical Materials and Structures, 2007, 2 (9), pp. 1787-1803. ⟨hal-00262224⟩

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