Square-Extensional Mode Single Crystal Silicon Micromechanical RF resonator, Transducers, 2003. ,
High frequency capacitive micromechanical resonators with reduced motional resistance using the HARPSS technology, Digest of Papers. 2004 Topical Meeting onSilicon Monolithic Integrated Circuits in RF Systems, 2004., 2004. ,
DOI : 10.1109/SMIC.2004.1398189
1.51GHz nanocrystalline diamond micromechanical disk resonator with material mismatched isolating support, MEMS Conference, 2004. ,
URL : https://hal.archives-ouvertes.fr/hal-01383571
Micromechanical " Hollow-disk " ring resonators, IEEE, 2004. ,
Vibrating micromechanical resonator with solid dielectric capacitive transducer gaps Frequency control/precision time & time interval symposium, IEEE Int, 2005. ,
High-Aspect-Ratio SOI Vibrating Micromechanical Resonators and Filters, 2006 IEEE MTT-S International Microwave Symposium Digest, 2006. ,
DOI : 10.1109/MWSYM.2006.249705
URL : http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.626.7854
Comparison of RSG-MOSFET and capacitive MEMS resonator detection, Electronics Letters, vol.41, issue.5, pp.242-244, 2005. ,
DOI : 10.1049/el:20047409
2D ultrashallow junction characterization of MOSFET with strained silicon, Proceedings of the Seventh International Workshop on the Fabrication, Characterization, and Modeling of ultrashallow Doping profiles in Semiconductors, pp.373-376, 2004. ,
Isotropic Etching of Si1- xGex Buried Layers Selectively to Si for the Realization of Advanced Devices, ECS, 2006. ,