, Design of a novel highly capacitive MEMS-based vibration to electricity energy converter with suspended in-plane overlap technology, Proc. of APCOT'06, 2006.
, A bulk silicon-based vibration-to-electric energy converter using an In-Plane Overlap Plate (IPOP) Mechanism, Proc. of PowerMEMS, pp.169-172, 2006.
, Micro-electrostatic vibration-to-electricity converters Chip-size antennas for implantable sensors and smart dusts, Proc. of IMEC'02 Proc. of Transducers'05, pp.457-460, 2002.
, Energy harvesting vibration sources for microsystems applications, Measurement Science and Technology, vol.17, issue.12, pp.175-195, 2006.
DOI : 10.1088/0957-0233/17/12/R01
, Fabrication and Characterization of High Damping Electrostatic Micro Devices for Vibration Energy Scavenging, Proc. of DTIP'05, pp.386-390, 2005.
URL : https://hal.archives-ouvertes.fr/hal-00009212
, Design and fabrication of piezoelectric micro power generators for autonomous microsystems, Proc. of DTIP'05, pp.299-302, 2005.
URL : https://hal.archives-ouvertes.fr/hal-00009215
, An electromagnetic, vibration-powered generator for intelligent sensor systems, Sensors and Actuators, vol.110, pp.344-349, 2004.
, Vibration-to-electric energy conversion Micro-machined variable capacitors for power generation Motion based generators for industrial applications Micro seismic electret generator for energy harvesting New tunable RF MEMS Microinductor design Advanced etching based on deep reactive ion etching for silicon high aspect ratio microstructures and three dimensional micro and nano structures A variable capacitance vibration-to-electric energy harvester, Proc. of Electrostatic'03 Proc. of DTIP'06 Proc. of PowerMEMS IEEE transactions on circuits and systems, pp.64-76, 2001.