Effects of viscoelastic and fluid damping on the quality factor for a resonant microcantilever

Russel Cox (1) , Michael Wenzel (1) , Fabien Josse (1) , Stephen Heinrich (2) , Isabelle Dufour (3)

1 Department of Electrical and Computer Engineering
2 Department of Civil, Construction and Environmental Engineering [Milwaukee]
3 IMS - Laboratoire de l'intégration, du matériau au système

Domaines: Micro et nanotechnologies/Microélectronique

Russel Cox, Michael Wenzel, Fabien Josse, Stephen Heinrich, Isabelle Dufour. Effects of viscoelastic and fluid damping on the quality factor for a resonant microcantilever. 8th. World Congress on Computational Mechanics (WCCM8), Jul 2008, Venise, Italy. ⟨hal-00256234⟩