Structural and optical properties of high density Si-ncs synthezised in SiNx:H by remote PECVD and annealing

Marzia Carrada (1) , A. Zerga (1) , A. Amann (1) , J.J. Grob (1) , J.P. Stoquert (1) , A. Slaoui (1) , Caroline Bonafos , Sylvie Schamm-Chardon

1 InESS - Institut d'Electronique du Solide et des Systèmes

Marzia Carrada, A. Zerga, A. Amann, J.J. Grob, J.P. Stoquert, et al.. Structural and optical properties of high density Si-ncs synthezised in SiNx:H by remote PECVD and annealing. European Material Research Society (E-MRS) Spring Conference, Symposium on Semiconductor Nanostructures towards Electronic and Optoelectronic Device Applications, May 2007, Strasbourg, France. ⟨hal-00250454⟩