Design of silicon-pTMDS bio-MEMS with millimeter and sub-millimeter waves transducers
Résumé
Biosensors allow investigating complex media with many applications in biology, environment and food processing. But new constraints in terms of sensitivity, real-time measurement and life time lead to new designs. Microfluidic and microsystems technologies can bring interesting solutions. We present here a new technological method for the microfabrication of such biosensors, called hioMEMS, based on the deposition of a polymer on a silicon substrate by “cold” RPECVD. Moreover, this structure is well suitable for the deposition of planar waveguide up to the THz frequencies. We try to develop a transduction function based on the dielectric spectroscopy of biomolecnles and we present some experimental results obtained up to 2ZOGHz with an on-wafer vectorial network analyzer.