Characterization of Optical Coatings with a CCD angular and Spatial Resolved Scatterometer

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Conference papers
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https://hal.archives-ouvertes.fr/hal-00243136
Contributor : Laurent Gallais <>
Submitted on : Wednesday, February 6, 2008 - 7:30:22 PM
Last modification on : Monday, March 4, 2019 - 2:04:11 PM

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Myriam Zerrad, Michel Lequime, Carole Deumie, Claude Amra. Characterization of Optical Coatings with a CCD angular and Spatial Resolved Scatterometer. Optical Interference Coatings (OIC) 2007, 2007, Tucson, United States. ⟨hal-00243136⟩

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